Influence of Oxygen to Argon Ratio on the Structural and Morphological Properties of Nb-Doped SrTiO<sub>3</sub>Epitaxial Films Grown by Reactive Ion Beam Sputter Deposition

• 作者: Gasidit Panomsuwan Nagahiro Saito
• 来源期刊: 晶体结构理论与应用(英文)
• 学科: 物理学
• 关键词: Nb-Doped SrTiO3 Epitaxial Films Crystal Structure Ion Beam SPUTTER Deposition
• 年，卷（期）: 2013,（1）
• 页码范围: 34-38
• 页数: 5页
• 分类号: O4

摘要

Nb-doped SrTiO3 (STNO) films were grown on (001)-oriented LaAlO3 substrates by a reactive ion beam sputter deposition at various mixing ratios (OMRs) with a substrate temperature of 800oC. The STNO films exhibited good crystallinity with an epitaxial orientation as characterized by high-resolution X-ray diffraction, grazing-incidence X-ray diffraction, and in-plane pole figure analysis. A decrease of out-of-plane and in-plane lattice constants was observed with an increase of OMR. The surface morphology of the STNO films showed a very dense fine-grain structure. The root-mean-square roughness was found to be increased as the OMR increased. Moreover, the elemental compositions of the STNO films were examined by X-ray photoelectron spectroscopy.