Multi-channel DFB laser array fabricated by SAG with optimized epitaxy conditions
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摘要:
Selective area growth (SAG) is performed to fabricate monolithically integrated distributed feedback (DFB)laser array by adjusting the width of a SiO2 mask.A strain-compensated-barrier structure is adopted to reduce the accumulated strain and improve the quality of multi-quantum well materials.Varying the strip width of the SAG masks,the DFB laser array with an average channel spacing of 1.47 nm is demonstrated by a conventional holographic method with constant-pitch grating.The threshold current from 14 to 18 mA and over 35-dB side mode suppression ratio (SMSR) are obtained for all DFB lasers in the array.