Two-dimensional microscanner for laser projection

• 来源期刊: 中国光学快报（英文版）
• 年，卷（期）: 2013,（6）
• 页码范围: 70-72
• 页数: 3页
• 语种: 英文
• DOI: 10.3788/COL201311.062301

摘要

The design of a two-dimensional (2D) microscanner actuated electrostatically is presented,and a silicon-oninsulator (SOI) micromachining process is utilized to fabricate the sample.The microscanner can oscillate at inherent frequencies of 1146 and 360 Hz around two rotational axes,generating maximum twisting angles of ±10° and ±5.3° under two 10-V square waves,respectively.A monochromatic laser projection system based on Lissajous pattern is demonstrated using the developed microscanner,revealing an image resolution of 168×56 at 20 frames per second.