High Density Fluorine Negative-Ion Source Generated by Utilizing Magnetized SF<sub>6</sub>

• 作者: M. Abid Imtiaz Tetsu Mieno
• 来源期刊: 现代物理(英文)
• 学科: 物理学
• 关键词: FLUORINE NEGATIVE-ION Ion Source String-Type PLASMA Radial Diffusion Langmuir Probe MAGNETIZED PLASMA Sulfur Hexafluoride
• 年，卷（期）: 2014,（2）
• 页码范围: 89-91
• 页数: 3页
• 分类号: O53

摘要

In a magnetized plasma column generated from an electronegative gas, negative-ions accumulate around the plasma column via radial diffusion. In this study, a dc discharge is applied in SF6 gas to produce a plasma column, and the radial density profile of negative-ions is measured by Langmuir probes using the modified Bohm criterion. The gas pressure and discharge current dependences of negative-ion density are also measured. It is found that the negative-ion density of 8.0 × 1017 m-3 is obtained around the plasma column at r = 1.0 cm when SF6 pressure is 0.13 Pa and discharge current is 0.50 A. The negative-ion density has radial gradient, and the electron density is much lower in this region.