篇名 | Influence of roughness on the detection of mechanical characteristics of low-k film by the surface acoustic waves | ||
来源期刊 | 中国物理B(英文版) | 学科 | |
关键词 | low-k film mechanical character detection rough surface rough interface surface acoustic wave | ||
年,卷(期) | 2014,(10) | 所属期刊栏目 | |
研究方向 | 页码范围 | 424-428 | |
页数 | 5页 | 分类号 | |
字数 | 语种 | 中文 | |
DOI | 10.1088/1674-1056/23/10/106803 |