Micro-Opto-Mechanical Disk for Inertia Sensing

• 来源期刊: 光子传感器（英文版）
• 关键词: Micro-opto-Mechanical system photonic inertia sensor hybrid integration
• 年，卷（期）: 2016,（1）
• 页码范围: 78-84
• 页数: 7页
• 语种: 英文
• DOI: 10.1007/s13320-015-0294-4

摘要

An optically enabled z-axis micro-disk inertia sensor is presented,which consists of a disk-shaped proof mass integrated on top of an optical waveguide.Numerical simulations show that the optical power of laser beam propagating in a narrow silicon nitride (Si3N4) waveguide located under the disk is attenuated in response to the vertical movement of the micro-disk.The high leakage power of the TM mode can effectively be used to detect a dynamic range of 1 g-10g (g=9.8 rn/s).At lest,the waveguide is kept at a nominal gap of 1 μm from the proof mass.It is adiabatically tapered to a narrow dimension of W×H =350×220nm2 in a region where the optical mode is intended to interact with the proof mass.Furthermore,the bottom cladding is completely etched away to suspend the waveguide and improve the optical interaction with the proof mass.The proposed optical inertia sensor has a high sensitivity of 3 dB/g when a 50 μm-long waveguide is used (normalized sensitivity 0.5 dB/μm2) for the vertical movement detection.