High x polystyrene-b-polycarbonate for next generation lithography

• 来源期刊: 中国科学:化学（英文版）
• 年，卷（期）: 2017,（6）
• 页码范围: 679-680
• 页数: 2页
• 语种: 英文
• DOI: 10.1007/s11426-017-9043-7

摘要

Over the past half century,the semiconductor chips have deeply influenced our everyday life through increasingly sophisticated electronic products.The central driving force underlying the remarkable evolution in semiconductor industry is Moore's Law,nowadays referring to a doubling of transistor counts per chip every 18 months.