Mode transition in dusty micro-plasma driven by pulsed radio-frequency source in C2H2/Ar mixture

• 来源期刊: 中国物理B（英文版）
• 关键词: pulsed process parameters C2H2/Ar microdischarges dusty plasma
• 年，卷（期）: 2017,（4）
• 页码范围: 270-275
• 页数: 6页
• 语种: 英文
• DOI: 10.1088/1674-1056/26/4/045202

摘要

Physical qualities of dusty plasma in the pulsed radio-frequency C2H2/Ar microdischarges are carefully investigated by a one-dimensional hydrodynamic model and aerosol dynamics model.Since the thermophoretic force has a great effect on the nanoparticle density spatial distribution,the neutral gas energy equation is taken into accounted.The effects of pulse parameters (dust ratio,modulation frequency) on the nanoparticle formation and growth process are mainly discussed.The calculation results show that,as the duty ratio increases,the mode transition from the sheath oscillation (α regime) to the secondary electron heating (γregime) occurred,which is quite different from the conventional pulsed discharge.Moreover,the effect of modulation frequency on the width of sheath and plasma density is analyzed.Compared with the H2CC-ions,the modulation frequency effect on the nanoparticles density becomes more prominent.