We conduct a study on the superlinear transport of multilayer graphene channels that partially or completely locate on silicon which is pre-etched by inductively coupled plasma (ICP).By fabricating a multilayer-graphene field-effect transistor on a Si/SiO2 substrate,we obtain that the superlinearity results from the interaction between the multilayer graphene sheet and the ICP-etched silicon.In addition,the observed superlinear transport of the device is found to be consistent with the prediction of Schwinger's mechanism.In the high bias regime,the values of α increase dramatically from 1.02 to 1.40.The strength of the electric field corresponding to the on-start of electronhole pair production is calculated to be 5 × 104 V/m.Our work provides an experimental observation of the nonlinear transport of the multilayer graphene.