Analysis of proton and γ-ray radiation effects on CMOS active pixel sensors

• 来源期刊: 中国物理B（英文版）
• 关键词: complementary metal-oxide-semiconductor (CMOS) active pixel sensor dark current fixed-pattern noise quantum efficiency
• 年，卷（期）: 2017,（11）
• 页码范围: 264-268
• 页数: 5页
• 语种: 英文
• DOI: 10.1088/1674-1056/26/11/114212

摘要

Radiation effects on complementary metal-oxide-semiconductor (CMOS) active pixel sensors (APS) induced by proton and γ-ray are presented.The samples are manufactured with the standards of 0.35 μm CMOS technology.Two samples have been irradiated un-biased by 23 MeV protons with fluences of 1.43 × 1011 protons/cm2 and 2.14 × 1011 protons/cm2,respectively,while another sample has been exposed un-biased to 65 krad(Si) 60Co γ-ray.The influences of radiation on the dark current,fixed-pattem noise under illumination,quantum efficiency,and conversion gain of the samples are investigated.The dark current,which increases drastically,is obtained by the theory based on thermal generation and the trap induced upon the irradiation.Both γ-ray and proton irradiation increase the non-uniformity of the signal,but the nonuniformity induced by protons is even worse.The degradation mechanisms of CMOS APS image sensors are analyzed,especially for the interaction induced by proton displacement damage and total ion dose (TID) damage.