Fabrication of Al air-bridge on coplanar waveguide

• 来源期刊: 中国物理B（英文版）
• 关键词: air-bridge fabrication superconducting coplanar waveguide
• 年，卷（期）: 2018,（10）
• 页码范围: 113-116
• 页数: 4页
• 语种: 英文
• DOI: 10.1088/1674-1056/27/10/100310

摘要

Superconducting coplanar waveguide (CPW) can be widely used as two-dimensional (2D) resonator, transmission line or feedline, providing an important component for superconducting quantum circuit which is a promising candidate for quantum information processing. Due to the discontinuities and asymmetries in the ground planes, CPW usually exhibits the spurious resonance, which is a common source of decoherence in circuit quantum electrodynamics experiments. To mitigate the spurious resonance, we fabricated superconducting aluminum air-bridges on Nb CPW. The fabricated air-bridges are approximately 3 μm high and up to 120 μm long. Compared with other methods, the fabrication procedures of our air-bridges are simpler, and the air-bridge can withstand strong ultrasound.