Variable angle spectroscopic ellipsometry and its applications in determining optical constants of chalcogenide glasses in infrared

• 来源期刊: 中国物理B（英文版）
• 关键词: chalcogenide glasses/thin films VASE optical constants infrared
• 年，卷（期）: 2018,（6）
• 页码范围: 452-458
• 页数: 7页
• 语种: 英文
• DOI: 10.1088/1674-1056/27/6/067802

摘要

The principle of variable angle spectroscopic ellipsometry (VASE) and the data analysis models,as well as the applications of VASE in the characterization of chalcogenide bulk glasses and thin films are reviewed.By going through the literature and summarizing the application scopes of various analysis models,it is found that a combination of various models,rather than any single data analysis model,is ideal to characterize the optical constants of the chalcogenide bulk glasses and thin films over a wider wavelength range.While the reliable optical data in the mid-and far-infrared region are limited,the VASE is flexible and reliable to solve the issues,making it promising to characterize the optical properties of chalcogenide glasses.