Etching-assisted femtosecond laser microfabrication

• 来源期刊: 中国物理B（英文版）
• 关键词: femtosecond laser microfabrication microlens array etching
• 年，卷（期）: 2018,（9）
• 页码范围: 61-68
• 页数: 8页
• 语种: 英文
• DOI: 10.1088/1674-1056/27/9/094212

摘要

Although femtosecond laser microfabrication is one of the most promising three-dimensional(3D)fabrication tech-niques,it could suffer from low fabrication efficiency for structures with high 3D complexities.By using etching as a main assistant technique,the processing can be speeded up and an improved structure surface quality can be provided.However,the assistance of a single technique cannot satisfy the increasing demands of fabrication and integration of highly functional 3D microstructures.Therefore,a multi-technique-based 3D microfabrication method is required.In this paper,we briefly review the recent development on etching-assisted femtosecond laser microfabrication(EAFLM).Various processing ap-proaches have been proposed to further strengthen the flexibilities of the EAFLM.With the use of the multi-technique-based microfabrication method,3D microstructure arrays can be rapidly defined on planar or curved surfaces with high structure qualities.