A slot microring sensor with feedback spiral waveguide for trace gas CH4 sensing in mid-infrared region

• 来源期刊: 光电子快报（英文版）
• 年，卷（期）: 2019,（1）
• 页码范围: 1-5
• 页数: 5页
• 语种: 英文
• DOI: 10.1007/s11801-019-8107-4

摘要

In this paper,a slot microring resonator with a piece of spiral feedback waveguide for CH4 sensing application is proposed.This sensor is based on silicon-on-insulator (SOI) substrate and with the operation wavelength in mid-infrared region.To reach high sensitivity and good selectivity,slot cross section and spiral feedback waveguide are carefully tailored.The sensor shows ppb-scale trace gas sensing potential and is easy to be packaged in integrated photonics circuits.Calculation results show that the sensitivity reaches 1.4× 10-2 dB/ppm and the detection limit achieves 700 ppb in the case of Lspiral=100Lr.