Electrically triggered dual-band tunable terahertz metamaterial band-pass filter based on Si3N4–VO2–Si3N4 sandwich

• 来源期刊: 中国物理B（英文版）
• 关键词: tunable band-pass filter hybrid metamaterials terahertz vanadium dioxide (VO2)
• 年，卷（期）: 2019,（5）
• 页码范围: 129-135
• 页数: 7页
• 语种: 英文
• DOI: 10.1088/1674-1056/28/5/054203

摘要

We experimentally demonstrate an electrically triggered terahertz (THz) dual-band tunable band-pass filter based on Si3N4–VO2–Si3N4 sandwich-structured hybrid metamaterials. The insulator–metal phase transition of VO2 film is induced by the Joule thermal effect of the top metal layer. The finite-integration-time-domain (FITD) method and finite element method (FEM) are used for numerical simulations. The sample is fabricated using a surface micromachining process, and characterized by a THz time-domain-spectrometer (TDS). When the bias current is 0.225 A, the intensity modulation depths at two central frequencies of 0.56 THz and 0.91 THz are about 81.7％and 81.3％, respectively. This novel design can achieve dynamically electric–thermo–optic modulation in the THz region, and has potential applications in the fields of THz communications, imaging, sensing, and astronomy exploration.