Comparison of Epitaxial and Textured Ferroelectric BaTiO<sub>3</sub>Thin Films

• 作者: Baba Wague Bertrand Vilquin Nicolas Baboux Pedro Rojo Romeo Yves Robach
• 来源期刊: 现代物理(英文)
• 学科: 物理学
• 关键词: FERROELECTRIC Barium TITANATE Thin Film Silicon Sputtering EPITAXY
• 年，卷（期）: 2020,（4）
• 页码范围: 509-516
• 页数: 8页
• 分类号: O48

摘要

The properties of BaTiO3 (BTO) thin films deposited on different substrates by RF magnetron sputtering were investigated. Two representative substrates were selected and different heterostructures were studied. 1) SrTiO3 (STO) single crystals as a bulk oxide reference material, and 2) silicon as a semiconductor. SrRuO3 (SRO) and Pt bottom electrodes were deposited on the silicon substrate. The BTO structural characterizations show that all the films have (001) crystallographic orientation. We have compared the electrical properties of the different samples: the same dielectric constant and polarization values were obtained independently of the nature of the substrate.