Compact NbN resonators with high kinetic inductance

• 来源期刊: 中国物理B（英文版）
• 年，卷（期）: 2020,（12）
• 所属期刊栏目: RAPID COMMUNICATION
• 页码范围: 121-126
• 页数: 6页
• 语种: 英文
• DOI: 10.1088/1674-1056/abc2b8

摘要

We design and fabricate λ/2 coplanar waveguide NbN resonators,the thickness and length of which are only several nanometers and hundred microns,respectively.The quality factor of such compact resonators can reach up to 7.5 x 104 at single photon power level at 30 mK with the resonance frequency around 6.835 GHz.In order to tune the resonant frequency,the resonator is terminated to the ground with a dc-SQUID.By tuning the magnetic flux in the dc-SQUID,the effective inductance of the dc-SQUID is varied,which leads to the change in the resonant frequency of the resonator.The tunability range is more than 30 MHz and the quality factor is about 3 x 103.These compact and tunable NbN resonators have potential applications in the quantum information processing,such as in the precision measurement,coupling and/or reading out the quantum states of qubits.