Metal Ion Beams in ECRIS

• 作者: CaoYun MaLei MaBaohua ZhaoHongwei FengYucheng WangHui LiJingyu
• 来源期刊: 近代物理研究所和兰州重离子加速器实验室年报：英文版
• 学科: 工学
• 关键词: ECR离子源 金属离子束 离子束光谱 离子流 等离子体溅射 MIVOC
• 年，卷（期）: 2002,（1）
• 页码范围: 146
• 页数: 1页
• 分类号: TL56

摘要

<正> Several methods can be used for the production of metal ion beams in an ECR source. There are many methods, including external oven, MIVOC (Metal Ions from Volatile Organic Compounds), plasma sputter, and so on. The choice of the most convenient method mainly depends on the material to be ionized and the structure of each ECR ion source. The oven technique is very efficient for the elements with relatively low