Laser direct writing and characterizations of flexible piezoresistive sensors with microstructures

• 作者: Chenying Zhang Wei Zhou Da Geng Cheng Bai Weida Li Songyue Chen Tao Luo Lifeng Qin Yu Xie
• 来源期刊: 光电进展（英文版）
• 年，卷（期）: 2021,（4）
• 所属期刊栏目: Original Article
• 页码范围: 16-26
• 页数: 11页
• 语种: 英文
• DOI: 10.29026/oea.2021.200061

摘要

Functional materials with high viscosity and solid materials have received more and more attentions in flexible pressure sensors, which are inadequate in the most used molding method. Herein, laser direct writing (LDW) method is proposed to fabricate flexible piezoresistive sensors with microstructures on PDMS/ MWCNTs composites with an 8％ MWCNTs mass fraction. By controlling laser energy, microstructures with different geometries can be obtained, which significantly impacts the performances of the sensors. Subsequently, curved microcones with excellent performance are fabricated under parameters of f = 40 kHz and v = 150 mm·s-1. The sensor exhibits continuous multi-linear sensitivity, ultrahigh ori-ginal sensitivity of 21.80 ％ kPa-1, wide detection range of over 20 kPa, response/recovery time of ～100 ms and good cycle stability for more than 1000 times. Besides, obvious resistance variation can be observed when tiny pressure (a peanut of 30 Pa) is applied. Finally, the flexible piezoresistive sensor can be applied for LED brightness controlling, pulse detection and voice recognition.