Research on the Key Technology of LTCC Pressure Sensor

• 作者: Qiulin TAN Tanyong WEI Xiaoyan DAI Yukun YUAN
• 来源期刊: 光子传感器:英文版
• 学科: 工学
• 关键词: 电容式压力传感器 LTCC 技术工艺 低温共烧陶瓷 空腔膨胀 结构设计 聚酰亚胺 压力环境
• 年，卷（期）: 2015,（3）
• 页码范围: 211-216
• 页数: 6页
• 分类号: TP212.12
• 语种: 中文

摘要

This article introduces the fabrication technology processes of the capacitive pressure sensor based on the low temperature co-fired ceramic (LTCC) material. Filling the cavity with different materials as a sacrificial layer is mainly discussed, and two different materials are chosen in the fabrication. It is found that the cavity filled with polyimide expands largely during sintering, while carbon ESL49000 material filled is more preferable to keep the cavity flat. Finally, the structure leaving without an air evacuation channel is designed and tested in a built-up pressure environment, the frequency measured decreases approximately linearly with the pressure applied, which proves the design leaving no air evacuation channel advisable.