Acidic Polyester Imides as Thermally Stable Binder Polymers for Negative-Tone Black Photoresist

• 作者: Genggongwo Shi Jun Bae Kyeongha Baek Lee Soon Park
• 来源期刊: 材料科学与应用期刊(英文)
• 学科: 化学
• 关键词: POLYESTER IMIDE One-Pot Solution Polymerization BLACK PHOTORESIST PHOTOLITHOGRAPHY
• 年，卷（期）: 2020,（4）
• 页码范围: 234-244
• 页数: 11页
• 分类号: O63

摘要

Polyimides are well-known for their high chemical inertness and thermal stability. However, it is usually challenging to synthesize UV-curable polyimides since the imidization reaction requires such harsh conditions that acrylate type double bonds cannot withstand. In this work, synthetic methods are developed to obtain polyester-imide type binder polymers with high thermal stability, high compatibility with the other components of the black photoresist, and fine photolithographic patterning property for the negative-tone black photoresist. The syntheses of diimide-diacid or diimide-diol intermediates for the polyesterification with dianhydride gave polyester imides which meets this requirement. The photolithographic tests have shown that the patterning of the micron-sized PDL of the organic light emitting diode (OLED) panel could be obtained. This work will interest the researchers working on the design and optimization of thermally stable binder polymers.