Epoxy Methacrylate Resin as Binder Polymer for Black Negative-Tone Photoresists

• 作者: Genggongwo Shi Jeseob Kim Jun Bae Kyeongha Baek Lee Soon Park Seon Hong Ahn
• 来源期刊: 材料科学与应用期刊(英文)
• 学科: 化学
• 关键词: EPOXY Methacrylate Resin Negative-Tone Photoresist BINDER POLYMER
• 年，卷（期）: clkxyyyqkyw_2020,（5）
• 页码范围: 285-295
• 页数: 11页
• 分类号: O63

摘要

Epoxy acrylate (EA) resin, which originates from epoxides, has long been served as a photocurable coating and adhesive material owing to its double bonds. Specifically, alkaline-developable EA resins can be used as a binder polymer in negative-tone photoresists. In this work, we synthesized a series of acidic polyester-type epoxy methacrylate resins, characterized the intermediates and products, and tested their performance as a binder polymer for the photolithographic micro-patterning of the pixel-defining layer on organic light-emitting diodes in comparison to a widely used commercial binder polymer. Copolymer-type binder polymer BP-2-2 was produced excellent patterning with no residue due to its high compatibility with the black mill base.