气相沉积

• 来源期刊: 表面工程：英文版
• 学科: 物理学
• 关键词: 气相沉积 波导开关 热光折射 长度优化 晶体生长
• 年，卷（期）: 2005,（1）
• 页码范围: 44-45
• 页数: 2页
• 分类号: O782

摘要

[篇名] 1.55-um silicon-based reflection-type waveguide-integrated thermo-optic switch, [篇名] 120 × 90 Element Thermoelectric Infrared Focal Plane Array with Precisely Patterned Au-black Absorber, [篇名] 4H-SiC Epitaxial Growth fcr High-Power Devices, [ 篇名 ] A 90 nm generation copper dual damascene technology with ALD TaN barrier, [ 篇名 ] A comparative microtribological investigation of diamond-like carbon films for applications in microsystems, [篇名] A comparison of microcrystailine silicon prepared by plasma-enhanced chemical vapor deposition and hot-wire chemical vapor deposition: electronic and device properties.