Structural Characterization of Thin Epitaxial GaN Films on Polymer Polyimides Substrates by Ion Beam Assisted Deposition

• 作者: Benjamin Herold Bernd Rauschenbach Jürgen W. Gerlach Sri Vidawati
• 来源期刊: 材料物理与化学进展(英文)
• 学科: 工学
• 关键词: Ion Beam Assisted Deposition Hexagonal GaN Thin Film SEM Quantum Design Physical Properties Measurement System RHEED
• 年，卷（期）: 2020,（9）
• 页码范围: 199-206
• 页数: 8页
• 分类号: TN3

摘要

The Epitaxial GaN thin films have been fabricated by Ion Beam Assisted Deposition (IBAD) process using nitrogen ions with hyperthermal energies on the polyimides polymer substrates. By applying with the Reflection of High-Energy Electron Diffraction (RHEED), Scanning Electron Microscopy (SEM) and Quantum Design Physical Properties Measurement System, the behaviour of hexagonal GaN thin films is investigated. The result showed that the high quality of the deposited GaN layers kept appearing for many parameters depending on the temperature greatly. The behaviour of high quality of epitaxial GaN coating on the polyimide polymer substrates is a promising material for optoelectronic devices and semiconductor devices application.