Coupled-ridge waveguide quantum cascade laser array lasing at λ～5μm

• 作者: Pengchang Yang Jinchuan Zhang Zenghui Gu Chuanwei Liu Yue Zhao Fengmin Cheng Shenqiang Zhai Ning Zhuo Junqi Liu Lijun Wang Shuman Liu Fengqi Liu
• 来源期刊: 半导体学报（英文版）
• 年，卷（期）: 2021,（9）
• 所属期刊栏目: ARTICLES
• 页码范围: 63-67
• 页数: 5页
• 语种: 英文
• DOI: 10.1088/1674-4926/42/9/092901

摘要

In this work,we demonstrated high-power quantum cascade laser (QCL) arrays lasing at λ ～ 5μm by employing an op-timized coupled-ridge waveguide (CRW) structure.Five-element QCL arrays were simulated and fabricated through a two-step etching method to extend the CRW structure to a mid-wave infrared regime.A lateral far-field with the main peak near a diffrac-tion-limited intensity curve of about 10° was observed by properly designing a geometric shape of the ridges and interspaces.By introducing a buried 2nd-order distributed feedback (DFB) grating,substrate emission with a radiation power above 1 W at 25 ℃ is achieved.Single longitudinal mode operation is obtained by changing the temperature of the heatsink with a good lin-ear wavelength tuning coefficient of-0.2 cm-1/K.