Photoic crystal nanobeam cavity devices for on-chip integrated silicon photonics

• 作者: Daquan Yang Xiao Liu Xiaogang Li Bing Duan Aiqiang Wang Yunfeng Xiao
• 来源期刊: 半导体学报（英文版）
• 年，卷（期）: 2021,（2）
• 所属期刊栏目: REVIEWS
• 页码范围: 40-51
• 页数: 12页
• 语种: 英文
• DOI: 10.1088/1674-4926/42/2/023103

摘要

Integrated circuit(IC)industry has fully considered the fact that the Moore's Law is slowing down or ending.Alternat-ive solutions are highly and urgently desired to break the physical size limits in the More-than-Moore era.Integrated silicon photonics technology exhibits distinguished potential to achieve faster operation speed,less power dissipation,and lower cost in IC industry,because their COMS compatibility,fast response,and high monolithic integration capability.Particularly,com-pared with other on-chip resonators(e.g.microrings,2D photonic crystal cavities)silicon-on-insulator(SOI)-based photonic crys-tal nanobeam cavity(PCNC)has emerged as a promising platform for on-chip integration,due to their attractive properties of ultra-high Q/V,ultra-compact footprints and convenient integration with silicon bus-waveguides.In this paper,we present a comprehensive review on recent progress of on-chip PCNC devices for lasing,modulation,switching/filting and label-free sens-ing,etc.